JPH02103271U - - Google Patents
Info
- Publication number
- JPH02103271U JPH02103271U JP1146289U JP1146289U JPH02103271U JP H02103271 U JPH02103271 U JP H02103271U JP 1146289 U JP1146289 U JP 1146289U JP 1146289 U JP1146289 U JP 1146289U JP H02103271 U JPH02103271 U JP H02103271U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor element
- semiconductor sensor
- flow sensor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989011462U JPH0642209Y2 (ja) | 1989-02-03 | 1989-02-03 | フローセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989011462U JPH0642209Y2 (ja) | 1989-02-03 | 1989-02-03 | フローセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02103271U true JPH02103271U (en]) | 1990-08-16 |
| JPH0642209Y2 JPH0642209Y2 (ja) | 1994-11-02 |
Family
ID=31220041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989011462U Expired - Lifetime JPH0642209Y2 (ja) | 1989-02-03 | 1989-02-03 | フローセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0642209Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS595919A (ja) * | 1982-07-01 | 1984-01-12 | Mitsubishi Electric Corp | 感熱形流量検出器 |
| JPS6239721A (ja) * | 1985-08-15 | 1987-02-20 | Nippon Soken Inc | 直熱型流量センサ |
-
1989
- 1989-02-03 JP JP1989011462U patent/JPH0642209Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS595919A (ja) * | 1982-07-01 | 1984-01-12 | Mitsubishi Electric Corp | 感熱形流量検出器 |
| JPS6239721A (ja) * | 1985-08-15 | 1987-02-20 | Nippon Soken Inc | 直熱型流量センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0642209Y2 (ja) | 1994-11-02 |